Thin films of LiCoO2 were prepared by pulsed laser deposition technique. Two important deposition parameters such as substrate temperature and oxygen partial pressure during the thin filmdepositionwere controlled. The composition of the experimental films was analyzed using X-ray photoelectron spectroscopy (XPS). The binding energy peaks of Co(2p3/2) and Co(2p1/2) are observed at 779.3eVand 794.4eVwhich can be attributed to the Co3+ bonding state of LiCoO2. The core level binding energy peak positions observed from XPS data and the estimated Li/Co ratio of the LiCoO2 films deposited in an oxygen partial pressure of 100 mTorr and in the substrate temperature range 300-700ï°Cindicated that the films are nearly stiochiometric. The FTIR displayed the characteristic IR dominant bands at 250 and 554cm-1 forLiCoO2.