All submissions of the EM system will be redirected to Online Manuscript Submission System. Authors are requested to submit articles directly to Online Manuscript Submission System of respective journal.

Abstract

On controlling of gas and heat transport in a vertical reactor process to improve properties of epitaxial layers

Author(s): E.L.Pankratov, E.A.Bulaeva

In this paper we analyzed mass and heat transport in a reactor from gas phase during growth an epitaxial layer. Based on results of the analysis we analyzed dependences of properties of grown layers on parameters of technological process.


Share this       

Recommended Conferences

Flyer