Abstract

Influence of porosity of epitaxial layer on quantity of radiation defects generated during radiation processing in amultilayer structure

Author(s): E.L.Pankratov, E.A.Bulaeva

In this paper we consider redistribution of radiation defects, which were generated during radiation processing, in a multilayer structure with porous epitaxial layer. It has been shown, that porosity of epitaxial layer gives a possibility to decrease quantity of radiation defects.