Effects of capillaryplasma discharge irradiationatdifferent appliedenergyonpolyethyleneterephthalate (PET) polymer films have been investigated by Fourier transforminfrared(FTIR) spectroscopy, and ultraviolet- visible (UV-VIS) spectroscopy.Moreover, Irradiation of polymers has become an important technique inproducingspecialmaterials forelectronic applications. Atmospheric pressurenon-thermal plasmas are ofgreat interest inpolymer surface treatmentdue totheir convenience, effectiveness and lowcost.Moreover, irradiation of polymers has become an important technique inproducingspecialmaterials forelectronic applications. Surfaceofpolyethylenetere-phthalate(PET)was modified by plasma produced fromthe capillary discharge. SomephysicalpropertiesofPTFEsampleswere studies. In this paper the change in the surface free energyof (PTFE) sampleswhich is induced bythe capillaryplasmadischarge, is investigated. Inaddition,FTIR technique is applied for sample analysis, to study the change in the structure of the filmas irradiated.The experimental analysisof thefilmhardness illustratethat the Vickerss micro hardness of the film increases upon plasmatreatment.Themorphologyof theparticulate and surface structurewhich generate bytheplasma ablation is investigated.The surfacemorphologyof the pristine and irradiatedPETand PTFEsamples are investigated as imaged byScanningElectronMicroscope (SEM).